JPH058676Y2 - - Google Patents

Info

Publication number
JPH058676Y2
JPH058676Y2 JP1985033371U JP3337185U JPH058676Y2 JP H058676 Y2 JPH058676 Y2 JP H058676Y2 JP 1985033371 U JP1985033371 U JP 1985033371U JP 3337185 U JP3337185 U JP 3337185U JP H058676 Y2 JPH058676 Y2 JP H058676Y2
Authority
JP
Japan
Prior art keywords
vapor
filter
solvent
dried
drying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985033371U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61151335U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985033371U priority Critical patent/JPH058676Y2/ja
Publication of JPS61151335U publication Critical patent/JPS61151335U/ja
Application granted granted Critical
Publication of JPH058676Y2 publication Critical patent/JPH058676Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP1985033371U 1985-03-11 1985-03-11 Expired - Lifetime JPH058676Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985033371U JPH058676Y2 (en]) 1985-03-11 1985-03-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985033371U JPH058676Y2 (en]) 1985-03-11 1985-03-11

Publications (2)

Publication Number Publication Date
JPS61151335U JPS61151335U (en]) 1986-09-18
JPH058676Y2 true JPH058676Y2 (en]) 1993-03-04

Family

ID=30535761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985033371U Expired - Lifetime JPH058676Y2 (en]) 1985-03-11 1985-03-11

Country Status (1)

Country Link
JP (1) JPH058676Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0695514B2 (ja) * 1986-12-25 1994-11-24 株式会社トクヤマ 乾燥方法
JPH062263Y2 (ja) * 1986-12-25 1994-01-19 徳山曹達株式会社 乾燥装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6123324A (ja) * 1984-07-11 1986-01-31 Hitachi Ltd 乾燥装置

Also Published As

Publication number Publication date
JPS61151335U (en]) 1986-09-18

Similar Documents

Publication Publication Date Title
KR19990083160A (ko) 세척물 건조장치 및 건조방법
JPH0697149A (ja) 蒸気乾燥法
JPH058676Y2 (en])
JPS63182818A (ja) 乾燥装置
JP3009006B2 (ja) 半導体基板の乾燥装置
JPH07283194A (ja) 洗浄・乾燥方法と洗浄装置
JP2644948B2 (ja) 被洗浄物の水分分離方法
JP3285683B2 (ja) ディスク基板の洗浄装置
JP3213654B2 (ja) 蒸気乾燥方法及び蒸気乾燥装置
JP2557515B2 (ja) 水蒸気乾燥装置
JP2678367B2 (ja) 蒸気洗浄装置
TW412798B (en) Apparatus and method for drying a semiconductor member
JPS62198126A (ja) 処理装置
JPH06275596A (ja) ベーパ処理装置
KR980011979A (ko) 웨이퍼 세정/건조 장치 및 방법
JPH0789547B2 (ja) 乾燥方法
JP2610441B2 (ja) ワークの乾燥方法
JP3137244B2 (ja) 洗浄物の乾燥装置及びその乾燥方法
JPS62245639A (ja) ベ−パ乾燥装置
JP3033146B2 (ja) 洗浄後の水切り乾燥方法
JPH0579944U (ja) 半導体ウエハ乾燥機
JPH0238439Y2 (en])
JPH10242113A (ja) ベーパ乾燥装置
JPH0134107B2 (en])
JPS6347933A (ja) 半導体装置用のウエハの洗浄方法